Modeling and optimization of MEMS microphone dust protection mesh for improved for acoustic performance using finite element method simulation

Currently, research on Micro-Electro-Mechanical Systems (MEMS) microphone dust protection meshes has predominantly focused on dust prevention capabilities, with scant attention given to acoustic performance, and there is a lack of systematic studies on the patterns of acoustic performance variation. This study utilizes finite element analysis to investigate the impact of structural parameters such as perforation radius, perforation rate, number of perforations, and perforation distribution patterns, as well as material properties like the density of the expanded-polytetrafluoroethylene(e-PTFE) membrane, on acoustic impedance and sound transmission loss. It was found that, at a constant perforation rate, a larger perforation radius results in lower acoustic impedance and sound transmission loss. This research provides a theoretical basis for the subsequent design of MEMS microphone dust protection meshes. Furthermore, an intelligent dust protection device based on metasurfaces has been proposed, which achieves an organic integration of dust prevention and sound wave control functions, and exhibits high sensitivity and robustness, laying the foundation for the development of future smart auditory technologies.