Structure optimization analysis of MEMS microphone packaging shell

Due to compact size, high consistency, and resistance to radio frequency interference, MEMS microphones are increasingly important in the consumer electronics market and have driven the development of intelligent applications. There is a growing demand for enhanced performance in MEMS microphones. Currently, research on the shell design of MEMS microphones is relatively shallow, often only considering the accommodation of the vibrating diaphragm and ASIC chip, as well as the minimization of volume, without focusing on the impact of the shell configuration on the microphone's acoustic performance. Therefore, this paper starts from the perspective of optimizing acoustic response and studies the impact of the packaging shell configuration and design parameters of MEMS microphones on the microphone's sensitivity and frequency response, including the sound collection hole diameter, chamber volume, and chip layout. The goal is to establish a quantitative relationship between these key parameters and the microphone's performance. Simulation software was used to simulate the acoustic characteristics of the microphone shell, and optimal design parameters were recommended based on the simulation results. In addition, the research also proposes methods to adjust the frequency response of the microphone within the target frequency range, providing a reference direction for the scientific design of the shell structure to reduce the transmission loss of acoustic energy and enhance response sensitivity.