Study on the suppression of secondary electron emission characteristics based on TiN

Abstract With the continuous development of satellite communications, the problem of high-frequency high-power multipactor caused by the miniaturization of microwave passive components in the aerospace field has become more and more serious. In this paper, for the problem of multipactor suppression of load passive devices, we carried out research on the preparation of TiN thin films based on PEALD and put forward a new method for suppressing SEE with good suppression effect, high consistency, low surface resistance, and other aspects of the unity of the multipactor effect. The use of 20nm TiN coating can make the silver-plated surface secondary electron emission coefficient down to 1.59. The RF surface resistance change rate is less than 3%. In the field of communication, satellite and navigation and other fields have a wide range of application prospects.