Enhancing the Piezoelectric Properties of Ultra-Thin ZnO Films on Flexible Substrates Using Atmospheric Pressure Spatial ALD

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SPIRE - Sciences Po Institutional REpository
Published
2024-12-01
Primary Topic
Surface Roughness and Optical Measurements
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article
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article

Enhancing the Piezoelectric Properties of Ultra-Thin ZnO Films on Flexible Substrates Using Atmospheric Pressure Spatial ALD

Rodriguez Gustavo A. Ardila, Hayri Okcu, Laëtitia Rapenne, David Muñoz‐Rojas
SPIRE - Sciences Po Institutional REpository
Surface Roughness and Optical Measurements
article

Enhancing the Piezoelectric Properties of Ultra-Thin ZnO Films on Flexible Substrates Using Atmospheric Pressure Spatial ALD

Rodriguez Gustavo A. Ardila, Hayri Okcu, Laëtitia Rapenne, David Muñoz‐Rojas
article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Institut polytechnique de Grenoble (FR), Laboratoire des Matériaux et du Génie Physique (FR), Université Savoie Mont Blanc (FR)
Openalex Percentile: Top 79%
Surface Roughness and Optical Measurements
OpenAlex
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Enhancing the Piezoelectric Properties of Ultra-Thin ZnO Films on Flexible Substrates Using Atmospheric Pressure Spatial ALD — Rodriguez Gustavo A. Ardila, Hayri Okcu, et al. · SPIRE - Sciences Po Institutional REpository (2024) | TGRS Research Map | TGRS