How laser material processing can benefit from OCT technology

Abstract Ultrashort‐pulse (USP) laser ablation enables the creation of freeform shapes that are challenging to produce with conventional optics manufacturing techniques. To maintain the industrial standards of many branches, it is crucial to not only consider material removal rates but also the surface quality and subsurface damage (SSD). This study investigates the SSD patterns generated in fused silica and quantifies key parameters such as the SSD depth by applying optical coherence tomography (OCT).