Substrate Integrated Waveguide in 3D Integrated Technology for D-Band Applications

A Substrate Integrated Waveguide developed in a 3D technology and implemented between two silicon dies is presented. This waveguide was designed to operate in the millimeter D-Band (110 GHz – 170 GHz). This first fabrication allows the validation of both the design and the proposed 3D technology for millimeter-wave applications. Indeed, a similar frequency behavior can be observed in the simulation and measurement results.

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Published
2024-09-23
DOI
https://doi.org/10.23919/eumic61603.2024.10732684
Primary Topic
Microwave Engineering and Waveguides
Type
article
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Substrate Integrated Waveguide in 3D Integrated Technology for D-Band Applications

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Substrate Integrated Waveguide in 3D Integrated Technology for D-Band Applications

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article en

Abstract

A Substrate Integrated Waveguide developed in a 3D technology and implemented between two silicon dies is presented. This waveguide was designed to operate in the millimeter D-Band (110 GHz – 170 GHz). This first fabrication allows the validation of both the design and the proposed 3D technology for millimeter-wave applications. Indeed, a similar frequency behavior can be observed in the simulation and measurement results.

Institut polytechnique de Grenoble (FR), Centre National de la Recherche Scientifique (FR), Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR), Laboratoire d'Électronique des Technologies de l'Information (FR), Université Grenoble Alpes (FR)
Industry, innovation and infrastructure
Openalex Percentile: Top 83%
Microwave Engineering and Waveguides
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