Electro-Thermally Actuated Structures Evaluated for Metasurface-Based Gas Sensing System

In this paper we present a numerical study performed on a circular geometry for micro-heater structures, with a particular focus on their potential applications in plasmonic gas sensors. The basic temperature required to fulfil a broadband source role for each simulated structure is 300 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$^\circ\mathrm{C}$</tex>. The simulation conditions included natural convection and radiation, electromagnetic heating, and structure fixation. The initial structure was compared with a modified version that incorporated a reflector. Structures realized on fused silica or a silicon oxide membrane were investigated.