Fabrication and Low Range Pressure Sensor Application of Polyimide Based Cr-N Thin Film Strain Gauge Element

We have developed a Cr-N alloy thin film showing a gauge factor (Gf) of about 10 and a temperature coefficient of resistivity (TCR) of about zero, which is expected as a new strain gauge material in the next generation. In this study, we have investigated the fabrication of polyimide-based Cr-N thin films and the pressure sensor application for very low pressure range using the films. We have found out that the usable crack free Cr-N thin films were obtained on polyimide bases due to using the lower spattering gas pressure, and also enabled to detect the very low range pressure of 1-30kPa sensitively.