Generation Energy by Vibration using Piezoelectric Longitudinal Effect of BaTiO<sub>3</sub> Thick Film Formed on Stainless Steel Substrate
In this paper, we evaluated generation energy by vibration using piezoelectric longitudinal effect of BaTiO3 thick film formed on stainless steel substrate with interdigitated electrodes. It was confirmed that the interdigitated electrodes formed on the surface of BaTiO3 film enables to align the polarization direction to the in-plane direction by forming Al2O3 layer on the surface of the stainless steel and generate energy by vibration due to the piezoelectric longitudinal effect.
Authors
- Yoshihiro Kawakami
Institutions
- Research Institute for Electromagnetic Materials (JP)
Publication Details
- Journal
- IEEJ Transactions on Sensors and Micromachines
- Published
- 2024-10-31
- DOI
- https://doi.org/10.1541/ieejsmas.144.364
- Primary Topic
- Engineering Applied Research
- Type
- article
- Field-Weighted Citation Impact
- 0.00