Dependence of Response to Bending and Torsional Deformation on Sealing Depth of MEMS Tactile Sensor in Elastomer Sheet

In this study, we evaluated the sensor sensitivity of bending and torsion sensing MEMS tactile sensors by the sealing depth of the sensor chip in order to improve the sensitivity by changing the sealing method. We succeeded in establishing a fabrication method by controlling the dimensions of the sensor during sealing process. Therefore, we fabricated sensors with different sealing depths, and the experimental results showed the dependence of sensitivity on the sealing depth.