Two-dimensional magnetic field diagnostics of plasma based on nano-thin-film probe

In this paper, we propose a method to determine the diagnostics of magnetic fields based on arrays of nano-thin-film probes that are manufactured by using magnetron sputtering-based fabrication and arranged in a two-dimensional (2D) topological design. Measurements of the magnetic field and its wave number based on the proposed method were validated in a linear cylindrical plasma device, the linear experimental advanced device. We manufactured nano-thin-film probes, each with a thickness of 500 nm, a diameter of 9 mm, and a shape similar to the Greek letter “omega” by depositing silver nanoparticles generated through magnetron sputtering to improve the accuracy of the fabrication as well as their time response. The 2D topological arrangement of the array of probes enabled the determination of the diagnostics of the magnetic field and its wave number at a high spatial resolution. Measurements of the amplitude of the magnetic field and its wavenumber obtained using the proposed method were in good agreement with the results of theoretical simulations in COMSOL, which verifies its high reliability and accuracy in obtaining low-pressure plasma diagnostics. In future work, we plan to apply our diagnostic method based on the array of thin-film probes to scenarios that require a high spatial resolution.