Atomic Layer Processing (ALP): Ubi es et Quo Vadis?

Abstract Atomic Layer Processing (ALP) techniques have transformed materials engineering by enabling atomic/molecular‐level control over composition, fidelity in structure replication, and properties. Tracing its origins to pioneering molecular layering and atomic layer deposition work in the mid‐20th century, this multifaceted field has remarkably diversified to include molecular layer deposition (MLD), atomic layer etching (ALE), area‐selective deposition (ASD), and vapor‐phase infiltration (VPI) processes. ALP is making great impacts across diverse disciplines – facilitating semiconductor miniaturization through ultrathin dielectric films, improving battery materials and engineering catalysts for energy applications, creating bioactive surfaces for advanced biomaterials, and promoting sustainable membranes for environmental remediation. As ALP techniques continue evolving through integration with additive manufacturing, machine learning, and in situ diagnostics, new frontiers in materials design are emerging, driven by the growing focus on environmental considerations like renewable precursors, energy‐efficient processes, and waste minimization. This perspective article examines ALP's historical development, highlights current state‐of‐the‐art applications across selected fields, and provides insights into the anticipated future trajectory, emerging application domains, and the pivotal role of academic‐industry‐research laboratory collaborations in catalyzing ALP innovations and facilitating its widespread adoption as a transformative manufacturing platform.

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Publication Details

Journal
Advanced Materials Interfaces
Published
2024-10-25
DOI
https://doi.org/10.1002/admi.202400408
Citations
6
Primary Topic
Semiconductor materials and devices
Type
article
Field-Weighted Citation Impact
1.25

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article

Atomic Layer Processing (ALP): Ubi es et Quo Vadis?

Kristina Ashurbekova, Mato Knez
6 citations
Advanced Materials Interfaces
Semiconductor materials and devices
1.25
article

Atomic Layer Processing (ALP): Ubi es et Quo Vadis?

Kristina Ashurbekova, Mato Knez
article en
6 citations

Abstract

Abstract Atomic Layer Processing (ALP) techniques have transformed materials engineering by enabling atomic/molecular‐level control over composition, fidelity in structure replication, and properties. Tracing its origins to pioneering molecular layering and atomic layer deposition work in the mid‐20th century, this multifaceted field has remarkably diversified to include molecular layer deposition (MLD), atomic layer etching (ALE), area‐selective deposition (ASD), and vapor‐phase infiltration (VPI) processes. ALP is making great impacts across diverse disciplines – facilitating semiconductor miniaturization through ultrathin dielectric films, improving battery materials and engineering catalysts for energy applications, creating bioactive surfaces for advanced biomaterials, and promoting sustainable membranes for environmental remediation. As ALP techniques continue evolving through integration with additive manufacturing, machine learning, and in situ diagnostics, new frontiers in materials design are emerging, driven by the growing focus on environmental considerations like renewable precursors, energy‐efficient processes, and waste minimization. This perspective article examines ALP's historical development, highlights current state‐of‐the‐art applications across selected fields, and provides insights into the anticipated future trajectory, emerging application domains, and the pivotal role of academic‐industry‐research laboratory collaborations in catalyzing ALP innovations and facilitating its widespread adoption as a transformative manufacturing platform.

Advanced Materials InterfacesVol. 12(4)
Ikerbasque (ES), CIC nanoGUNE (ES)
European Commission, Agencia Estatal de Investigación, H2020 Marie Skłodowska-Curie Actions
Responsible consumption and production
Openalex Percentile: Top 20%
Semiconductor materials and devices
1.25
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Atomic Layer Processing (ALP): Ubi es et Quo Vadis? — Kristina Ashurbekova, Mato Knez · Advanced Materials Interfaces (2024) | TGRS Research Map | TGRS