Reduction of surface roughness in selectively etched microchannels in lithium niobate

By post-etching annealing, the roughness of microchannels fabricated by fs laser assisted selective etching could be reduced to values of 2 nm. The influence of inscription parameters and annealing conditions on the microchannels’ roughness and the evolution of their shape with annealing temperature and time have been investigated. A functional dependence enabling the estimation of roughness values resulting from certain processing parameters was determined. The low surface roughness achieved enables the transport of fluids with very low friction factors and optical-grade surfaces for the combination of microfluidic channels with optical waveguides, allowing the acousto-optical, electro-optical, and (nonlinear) optical properties of lithium niobate to be utilized for future monolithic optofluidic devices.