Influence of Electrode Surface Roughness on Electromagnetic Field Radiation Due to Micro-Gap ESD Below 1 kV

Impulsive transient electromagnetic fields caused by electrostatic discharge (ESD) have a serious influence on modern IT high-tech equipment. However, the mechanism and transient characteristics of electromagnetic noise radiation by ESD have not yet been fully elucidated. In this study, in order to elucidate the radiation mechanism of transient electromagnetic waves due to micro gap ESD at charging voltages below 800 V, the relationship between the surface roughness of electrode and the radiation field strength was investigated experimentally. As a result, it was found that the electrode surface roughness affects the radiated electric field strength due to ESD, and when the electrode surface roughness is 3 μm or less, the electromagnetic field strength increases by about 14 V/m. Furthermore, the correlation between the electrode surface roughness and the radiation field strength showed a negative correlation from 450V to 600V, and a positive correlation from 700 V to 800 V.