Design and Simulation of Piezoelectric Resonator for Sensor Application

This research focuses on the design and simulation of piezoelectric resonator based on aluminum nitride (AlN) material intended for sensor application. The core component of this resonator is constructed using AlN material. This paper meticulously outlines the design parameters of the aluminum nitride piezoelectric resonator, encompassing material properties, size and shape, which were systematically optimized through finite element simulation software. The structural design was optimised, and a simulation was conducted using COMSOL Multiphysics tool to assess the resulting performance for the pressure sensor application. Using FEM modelling, the parameters like resonant frequency, admittance (Y11) and the reflection coefficient (S11) were studied. The resonant frequency achieved for the designed resonator is determined to be 2.188 GHz. The admittance (Y11) and the reflection coefficient (S11) is 143.3 dB and 34.62 dB respectively. As a part of the work, the comparative analysis of the resonator performance parameters with different materials like Zinc Sulfide (ZnS), Cadmium Sulfide (CdS), and zinc oxide (ZnO) were assigned as piezoelectric material and compared the results with AlN based resonator. However, it was found that AlN based resonator results are more effective than others. This comprehensive investigation provides crucial insights into the optimization of piezoelectric resonators tailored for pressure sensor applications. The results of this research also possess the capacity to substantially improve the precision and sensitivity of future pressure sensors. This discoveries offers a substantial contribution to the advancement of pressure sensing as a discipline, offering prospects for the creation of pressure sensors with exceptional performance. Predictably, this study will establish a fundamental basis for subsequent investigations in this field.