Basics and Current Aspects of Scanning Electron Microscopy
Abstract Presentation slides for the ISTFA 2024 Tutorial session “Basics and Current Aspects of Scanning Electron Microscopy.”
Authors
- Heiko Stegmann (ORCID: https://orcid.org/0000-0001-7147-0059)
Institutions
- Carl Zeiss (Germany) (DE)
Publication Details
- Journal
- Proceedings - International Symposium for Testing and Failure Analysis
- Published
- 2024-10-23
- DOI
- https://doi.org/10.31399/asm.cp.istfa2024tpp1
- Primary Topic
- Electron and X-Ray Spectroscopy Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00