Etching Monitoring of Advanced Forksheet Devices Using AKONIS SIMS Tool
Abstract Imec has developed a fully-functional integrated forksheet field-effect transistors (FETs), which is the most promising architecture for advancing beyond the GAA (Gate-All-Around) nanosheet generation for scaling and performance improvements past the 2nm technology node. From a manufacturing perspective, forksheet devices are extremely complex to process and requires accurate and sensitive analytical instruments like the AKONIS SIMS tool.
Authors
- O. Dulac
- A. Merkulov (ORCID: https://orcid.org/0000-0003-4101-0873)
- K. Soulard
- Marie Adier (ORCID: https://orcid.org/0000-0002-6256-7219)
- D. Jacobson
- P.A.W. van der Heide (ORCID: https://orcid.org/0000-0001-6292-0329)
- A-S. Robbes
- Alexis Franquet (ORCID: https://orcid.org/0000-0002-7371-8852)
- Rita Tilmann (ORCID: https://orcid.org/0000-0002-6304-9632)
- Seoyoun Choi
Institutions
- Cameca (France) (FR)
- IMEC (BE)
- Cameca (United States) (US)
Publication Details
- Journal
- Proceedings - International Symposium for Testing and Failure Analysis
- Published
- 2024-10-23
- DOI
- https://doi.org/10.31399/asm.cp.istfa2024p0175
- Primary Topic
- Advanced Data Storage Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00