Concept-Proof of Lock-in OBIRCH Application for Three-Dimensional Analysis of Four-Dimensional NAND Flash Memory
Abstract The importance of three-dimensional (3D) localization capability is growing as advanced semiconductor devices go to 3D structures. An algorithm for processing lock-in OBIRCH data was developed especially for 3D/4D memory devices. The concept was tested with a simple test sample, which was confirmed to be capable of generating depth separated images.
Authors
- Norimichi Chinone (ORCID: https://orcid.org/0000-0001-8765-9278)
- Akihito Uchikado
Institutions
- Hamamatsu Photonics (Japan) (JP)
Publication Details
- Journal
- Proceedings - International Symposium for Testing and Failure Analysis
- Published
- 2024-10-23
- DOI
- https://doi.org/10.31399/asm.cp.istfa2024p0327
- Primary Topic
- Advanced Data Storage Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00