Review of Scanning Probe Microscopy Methods for Failure Analysis (2024 Update)
Abstract Presentation slides for the ISTFA 2024 Tutorial session “Review of Scanning Probe Microscopy Methods for Failure Analysis (2024 Update).”
Authors
- Peter Wolf (ORCID: https://orcid.org/0000-0002-7408-2921)
Institutions
- Bruker (United States) (US)
Publication Details
- Journal
- Proceedings - International Symposium for Testing and Failure Analysis
- Published
- 2024-10-23
- DOI
- https://doi.org/10.31399/asm.cp.istfa2024tpl1
- Primary Topic
- Integrated Circuits and Semiconductor Failure Analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.00