Atom Probe Tomography: Introduction and Applications to SEMI

Abstract Presentation slides for the ISTFA 2024 Tutorial session “Atom Probe Tomography: Introduction and Applications to SEMI.”

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Publication Details

Journal
Proceedings - International Symposium for Testing and Failure Analysis
Published
2024-10-23
DOI
https://doi.org/10.31399/asm.cp.istfa2024tpy1
Primary Topic
Advanced Materials Characterization Techniques
Type
article
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article

Atom Probe Tomography: Introduction and Applications to SEMI

Katherine P. Rice
Proceedings - International Symposium for Testing and Failure Analysis
Advanced Materials Characterization Techniques
article

Atom Probe Tomography: Introduction and Applications to SEMI

Katherine P. Rice
article en

Abstract

Abstract Presentation slides for the ISTFA 2024 Tutorial session “Atom Probe Tomography: Introduction and Applications to SEMI.”

Proceedings - International Symposium for Testing and Failure AnalysisVol. 84925
Cameca (United States) (US)
Openalex Percentile: Top 83%
Advanced Materials Characterization Techniques
DOISourceOpenAlex
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Atom Probe Tomography: Introduction and Applications to SEMI — Katherine P. Rice · Proceedings - International Symposium for Testing and Failure Analysis (2024) | TGRS Research Map | TGRS