Enhancement of PDE and Noise Characteristics by Trench Guide with 2×2 Small Lens Array and Backside Pixel Isolation for 7μm SPAD Pixel
We present an optimized Light Detection and Ranging (LiDAR) process for $7 \mu \mathrm{~m}$ Single Photon Avalanche Diode (SPAD) pixel. We achieved a Photon Detection Efficiency (PDE) more than two times higher by using a Trench Guide (TG) and a $2 \times 2$ Small Lens Array (SLA) as optical structures. Additionally, we physically divided the pixels using Backside Pixel Isolation (BPI), which reduced both electrical and optical crosstalk, improving the noise characteristics of the SPAD sensor. Finally, we achieved a PDE of 26.4% at $\lambda=940 \mathrm{~nm}, \mathrm{Vex}=2.5 \mathrm{~V}$, and an error rate of less than 0.4% in the average depth accuracy performance of the SPAD sensor.
Authors
- Nam Il Kim
- Jinsu An (ORCID: https://orcid.org/0000-0001-6518-7046)
- Seunghyun Yoon (ORCID: https://orcid.org/0000-0001-6264-976X)
- Wonje Park
- Kyungdo Kim (ORCID: https://orcid.org/0000-0001-7194-2984)
- Ahyoung Cho (ORCID: https://orcid.org/0000-0002-4328-4993)
- Jongchae Kim
- Seokhyeon Kim Kwangjun Cho
- Pyong‐Su Kwag
- Jae‐Hyung Jang (ORCID: https://orcid.org/0000-0001-9633-5574)
- Juhyun Cho
- Sangyeong Lee (ORCID: https://orcid.org/0000-0002-2909-0172)
- Soo Young Park (ORCID: https://orcid.org/0000-0002-4944-4396)
- Jaehyun Park (ORCID: https://orcid.org/0000-0002-9007-4892)
- Min Kyu Kim (ORCID: https://orcid.org/0000-0002-6401-9072)
- Hanseung Lee (ORCID: https://orcid.org/0000-0002-3233-502X)
- Jihee Han (ORCID: https://orcid.org/0000-0002-0166-2386)
- Changrock Song
- Hoonmoo Choi
- Yongtae Gim
- Suhyun Yi
- Hoon-Sang Oh
- K.-Y. Byun
- Hoesam Jeong
- Minsang Yu
- Taejun Baek
- S.T. Hwang
- Sunho Oh
Institutions
- SK Group (South Korea) (KR)
Publication Details
- Published
- 2024-09-09
- DOI
- https://doi.org/10.1109/esserc62670.2024.10719547
- Primary Topic
- Advanced Optical Sensing Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00