PLC-Based PID Control System for Semiconductor Education Research on Development and Implementation

IIn line with the government’s recent semiconductor talent training policy, vocational high schools and universities are receiving substantial funding for facility and equipment construction. Building semiconductor cleanroom facilities and processing equipment is very costly, while the limited lab space makes providing semiconductor education difficult. Therefore, an alternative education method which solves these issues is needed. To make PID control learning of semiconductor equipment more accessible in terms of cost, space, and difficulty, this study implemented a virtual system in a virtual simulation space, and confirmed the educational effectiveness through a comparative analysis of the real situation and virtual simulation.