Chemically Stable Group IV–V Transition Metal Carbide Thin Films in Hydrogen Radical Environments
Hydrogen is a crucial element in the green energy transition. However, its tendency to react with and diffuse into surrounding materials poses a significant challenge. Therefore, developing coatings to protect system components in hydrogen environments (molecular, radicals (H*), and plasma) is essential. In this work, we report group IV-V transition metal carbide (TMC) thin films as potential candidates for protective coatings in H* environments at elevated temperatures. We expose TiC, ZrC, HfC, VC, NbC, TaC, and Co<sub>2</sub>C thin films, with native surface oxycarbides/oxides (TMO <sub><i>x</i></sub> C <sub><i>y</i></sub> /TMO <sub><i>x</i></sub> ), to H* at elevated temperatures. Based on X-ray photoelectron spectroscopy performed on the samples before and after H*-exposure, we identify three classes of TMCs. HfC, ZrC, TiC, TaC, NbC, and VC (class A) are found to have a stable carbidic-C (TM-C) content, with a further subdivision into partial (class A1: HfC, ZrC, and TiC) and strong (class A2: TaC, NbC, and VC) surface deoxidation. In contrast to class A, a strong carbide reduction is observed in Co<sub>2</sub>C (class B), along with a strong surface deoxidation. The H* interaction with TMC/TMO <sub><i>x</i></sub> C <sub><i>y</i></sub> /TMO <sub><i>x</i></sub> is hypothesized to entail three processes: (i) hydrogenation of surface C/O atoms, (ii) formation of CH <sub><i>x</i></sub> /OH <sub><i>x</i></sub> species, and (iii) subsurface C/O atom diffusion to the surface vacancies. The number of adsorbed H atoms required to form CH <sub><i>x</i></sub> /OH <sub><i>x</i></sub> species (i) and the corresponding thermodynamic energy barriers (ii) are estimated based on the change in the Gibbs free energy (Δ<i>G</i>) for the reduction reactions of TMCs and TMO <sub><i>x</i></sub> . Hydrogenation of surface carbidic-C atoms is proposed to limit the reduction of TMCs, whereas the deoxidation of TMC surfaces is governed by the thermodynamic energy barrier for forming H<sub>2</sub>O.
Authors
- Marcelo Ackermann
- Robbert Wilhelmus Elisabeth van de Kruijs (ORCID: https://orcid.org/0000-0002-4738-0819)
- Jacobus M. Sturm
- Wesley T. E. van den Beld (ORCID: https://orcid.org/0000-0002-5449-3838)
- Abdul Rehman (ORCID: https://orcid.org/0000-0002-8846-9975)
Institutions
- University of Twente (NL)
Publication Details
- Journal
- The Journal of Physical Chemistry C
- Published
- 2024-10-22
- DOI
- https://doi.org/10.1021/acs.jpcc.4c04822
- Citations
- 3
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 0.63
Funders
- Carl-Zeiss-Stiftung
- University of Twente
- Nederlandse Organisatie voor Wetenschappelijk Onderzoek
- ASML