Exploring Nucleation Phenomena in Ultra-thin ALD and PE-ALD Films on NMC 811 Substrates: An In Situ Quartz Crystal Microbalance Study

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SPIRE - Sciences Po Institutional REpository
Published
2024-08-04
Primary Topic
Synthesis and properties of polymers
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article
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article

Exploring Nucleation Phenomena in Ultra-thin ALD and PE-ALD Films on NMC 811 Substrates: An In Situ Quartz Crystal Microbalance Study

Patrice Raynaud, László Pethő, Ivo Utke, Léo Lapeyre et al.
SPIRE - Sciences Po Institutional REpository
Synthesis and properties of polymers
article

Exploring Nucleation Phenomena in Ultra-thin ALD and PE-ALD Films on NMC 811 Substrates: An In Situ Quartz Crystal Microbalance Study

Patrice Raynaud, László Pethő, Ivo Utke, Léo Lapeyre, Johann Michler
article en

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SPIRE - Sciences Po Institutional REpository
Institut National Polytechnique de Toulouse (FR), Laboratoire Plasma et Conversion d'Energie (FR), École Nationale Supérieure d'Électrotechnique, d'Électronique, d'Informatique, d'Hydraulique et des Télécommunications (FR), Swiss Federal Laboratories for Materials Science and Technology (CH)
Openalex Percentile: Top 86%
Synthesis and properties of polymers
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