Modeling and Simulation of 2D Transducers Based on Suspended Graphene-Based Heterostructures in Nanoelectromechanical Pressure Sensors

Graphene-based two-dimensional (2D) heterostructures exhibit excellent mechanical and electrical properties, which are expected to exhibit better performances than graphene for nanoelectromechanical pressure sensors. Here, we built pressure sensor models based on suspended heterostructures of graphene/h-BN, graphene/MoS₂, and graphene/MoSe₂ by using COMSOL Multiphysics finite element software. We found that suspended circular 2D membranes show the best sensitivity to pressures compared to rectangular and square ones. We simulated the deflections, strains, resonant frequencies, and Young's moduli of suspended graphene-based heterostructures under the conditions of different applied pressures and geometrical sizes, built-in tensions, and the number of atomic layers of 2D membranes. The Young's moduli of 2D heterostructures of graphene, graphene/h-BN, graphene/MoS_2, and graphene/MoSe₂ were estimated to be 1.001 TPa, 921.08, 551.11, and 475.68 GPa, respectively. We also discuss the effect of highly asymmetric cavities on device performance. These results would contribute to the understanding of the mechanical properties of graphene-based heterostructures and would be helpful for the design and manufacture of high-performance NEMS pressure sensors.