Synthesis and electrical transport properties of superconducting platinum silicide thin films and devices
We evaluate the material characteristics of superconducting platinum silicide (PtSi) thin films as candidate materials for superconducting quantum information devices compatible with silicon technology. These films were synthesized using magnetron sputtering under ultrahigh vacuum conditions, followed by rapid thermal annealing. Polycrystalline PtSi films synthesized by this method have the favorable properties of superconducting critical temperature of 0.95 K and relatively long zero-temperature Ginzburg-Landau coherence length of 76 nm. We further studied coplanar microbridge devices fabricated by electron beam lithography and chlorine-free reactive ion etching, finding that the temperature-dependent critical current density follows the Ginzburg Landau depairing mechanism.
Authors
- Chenyu Zhou (ORCID: https://orcid.org/0000-0002-2749-4739)
- Tharanga Nanayakkara (ORCID: https://orcid.org/0000-0003-4316-9386)
- Ruoshui Li (ORCID: https://orcid.org/0000-0002-7903-7070)
- Mingzhao Liu (ORCID: https://orcid.org/0000-0002-0999-5214)
- Xiao Tong (ORCID: https://orcid.org/0000-0002-5567-9677)
- Abdul K. Rumaiz (ORCID: https://orcid.org/0000-0002-9907-299X)
- Kim Kisslinger (ORCID: https://orcid.org/0000-0002-6528-7044)
- Charles T. Black (ORCID: https://orcid.org/0000-0002-5157-0076)
- A. T. Bollinger (ORCID: https://orcid.org/0000-0002-3629-6611)
- Lihua Zhang (ORCID: https://orcid.org/0000-0003-3331-2345)
Institutions
- Brookhaven National Laboratory (US)
- Stony Brook University (US)
Publication Details
- Journal
- Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
- Published
- 2024-10-18
- DOI
- https://doi.org/10.1116/6.0004008
- Citations
- 3
- Primary Topic
- Semiconductor materials and interfaces
- Type
- article
- Field-Weighted Citation Impact
- 1.01
Funders
- U.S. Department of Energy