Silicon Crystallization on a Flexible Substrate Using Refractory Metals

This paper presents the results of the study of silicon crystallization on flexible polyimide substrates. Crystallization was carried out by the method of metal-induced laser-stimulated crystallization. A feature of this work is the use of refractory metals such as molybdenum and tungsten as an absorbing layer. An infrared pulsed laser is used for crystallization. To determine the quality of crystallization, the structure of silicon was studied by Raman scattering.

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Published
2024-09-26
DOI
https://doi.org/10.1109/apede59883.2024.10715748
Primary Topic
Thin-Film Transistor Technologies
Type
article
Field-Weighted Citation Impact
0.00

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article

Silicon Crystallization on a Flexible Substrate Using Refractory Metals

Alexey A. Serdobintsev, Larisa Volkovoinova
Thin-Film Transistor Technologies
article

Silicon Crystallization on a Flexible Substrate Using Refractory Metals

Alexey A. Serdobintsev, Larisa Volkovoinova
article en

Abstract

This paper presents the results of the study of silicon crystallization on flexible polyimide substrates. Crystallization was carried out by the method of metal-induced laser-stimulated crystallization. A feature of this work is the use of refractory metals such as molybdenum and tungsten as an absorbing layer. An infrared pulsed laser is used for crystallization. To determine the quality of crystallization, the structure of silicon was studied by Raman scattering.

Vol. 2
Saratov State University (RU)
Russian Science Foundation
Openalex Percentile: Top 84%
Thin-Film Transistor Technologies
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Silicon Crystallization on a Flexible Substrate Using Refractory Metals — Alexey A. Serdobintsev, Larisa Volkovoinova · (2024) | TGRS Research Map | TGRS