Calibration of Piezoresistive Pressure Sensors in a Wide Temperature Range

Piezoresistive pressure sensors (PPS) are widely used in various microelectronic devices applied in modern technologies. The performance of these sensors are highly dependent on the ambient temperature. Unfortunately, known methods of PPS calibration do not allow measuring pressure with the required accuracy in the wide temperature range typical, for instance, in aviation from −60 to 140 °C. In this paper, a conventional approach is used, when the dependence of the output voltage on pressure is represented using a polynomial of a relatively low order, and the dependences of the coefficients of this polynomial on temperature are specified by the cubic splines. The paper describes in detail the identification method of the polynomial model under consideration and obtains expressions for correcting the readings of the pressure gauge during pressure measurements in wide temperature ranges, when the temperature dependence model is specified using cubic splines. The results of experimental studies of specific pressure sensors are presented.