Self-supervised deep image restoration for x-ray computed laminographic tomography

X-ray computed laminographic tomography (CLT) is a viable tool for creating high-throughput volumetric imaging of large, planar samples. In this work, we present a self-supervised deep image restoration workflow to produce noise-free, artifact-free volumetric reconstructions for laminographic tomography. We demonstrate our CLT method on a variety of samples scanned with an in-house prototype system, showing that our proposed method notably outperforms classic reconstruction methods, that has the potential for more accurate detection of defects and estimation of critical dimensions, thereby providing a feasible solution for rapid inline inspection and failure analysis in advanced integrated circuits packaging.