Sensing–Actuating Integrated Ultrasonic Device for High-Precision and High-Efficiency Burnishing

A novel sensing and actuating integrated ultrasonic burnishing device (SAIUBD) through only one longitudinal ultrasonic transducer is presented. The sensing and actuating functions are achieved simultaneously by the SAIUBD that improves the burnishing precision and efficiency. Above all, the structure and working mechanism of the SAIUBD is amply depicted. Then, the structure size, sensing, and actuating parameters are designed through simulation analysis. Ultimately, the prototype is fabricated, and the piezoelectric self-sensing calibration and burnishing tests are presented. Testing results show that the steady-state error of ±0.287 <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">μ</i>m is achieved based on piezoelectric self-sensing, which means precision sensing and controlling of the burnishing amplitude without external sensors are achieved. Furthermore, the surface burnished by the SAIUBD achieves Ra 0.116 <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">μ</i>m, and the precision and efficiency have been improved by 36.3% and 50% compared to the traditional burnishing. The above results indicate that the novel SAIUBD has enormous advantages in improving burnishing precision and efficiency, which has great application potential in ultraprecision machining.