Force-compensation-based adaptive thermal shape correction method for XFEL optics

With the successive development of free electron laser (FEL) facilities based on superconducting technology, the advance and diversity of beamline optical design have posed more stringent challenges to the controlling of thermal deformation for key optical elements. In this article, an adaptive thermal shape correction structure is presented, which converts the thermal stress into a bending moment to correct the mirror thermal bump by utilizing the difference in coefficient of thermal expansion (CTE) between materials, and the location relative to the mirror neutral plane. This moment is involved owing to the temperature rise derived from the FEL heat load, which has a certain adaptability to various thermal surface profile and can be precisely controlled by a chiller temperature regulation. In this work, we optimize the dimensions and position of the thermal shape correction blocks by analytical method and FEA simulation respectively. Eventually, this force-compensation-based adaptive scheme can achieve sub-nano sensitivity (∼ 0.1 nm) of mirror shape control, considering factors such as ease of engineering implementation and operational feasibility, even under repetition rates up to 100 kHz.

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Publication Details

Journal
Optics Express
Published
2024-10-17
DOI
https://doi.org/10.1364/oe.542096
Citations
1
Primary Topic
Advancements in Photolithography Techniques
Type
article
Field-Weighted Citation Impact
0.21

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article

Force-compensation-based adaptive thermal shape correction method for XFEL optics

Hongliang Qin, Xueqing Yan, Zhongmin Xu, Weiqing Zhang et al.
1 citations
Optics Express
Advancements in Photolithography Techniques
0.21
article

Force-compensation-based adaptive thermal shape correction method for XFEL optics

Hongliang Qin, Xueqing Yan, Zhongmin Xu, Weiqing Zhang, Jiayin Liu, Ye Zhu
article en
1 citations

Abstract

With the successive development of free electron laser (FEL) facilities based on superconducting technology, the advance and diversity of beamline optical design have posed more stringent challenges to the controlling of thermal deformation for key optical elements. In this article, an adaptive thermal shape correction structure is presented, which converts the thermal stress into a bending moment to correct the mirror thermal bump by utilizing the difference in coefficient of thermal expansion (CTE) between materials, and the location relative to the mirror neutral plane. This moment is involved owing to the temperature rise derived from the FEL heat load, which has a certain adaptability to various thermal surface profile and can be precisely controlled by a chiller temperature regulation. In this work, we optimize the dimensions and position of the thermal shape correction blocks by analytical method and FEA simulation respectively. Eventually, this force-compensation-based adaptive scheme can achieve sub-nano sensitivity (∼ 0.1 nm) of mirror shape control, considering factors such as ease of engineering implementation and operational feasibility, even under repetition rates up to 100 kHz.

Optics ExpressVol. 32(24)
University of Science and Technology of China (CN), Dalian Institute of Chemical Physics (CN), Chinese Academy of Sciences (CN)
National Natural Science Foundation of China, Development and Reform Commission of Shenzhen Municipality
Affordable and clean energy
Openalex Percentile: Top 47%
Advancements in Photolithography Techniques
0.21
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Force-compensation-based adaptive thermal shape correction method for XFEL optics — Hongliang Qin, Xueqing Yan, et al. · Optics Express (2024) | TGRS Research Map | TGRS