Polishing Ceramic Samples with Fast Argon Atoms at Different Angles of Their Incidence on the Sample Surface

Mechanical polishing of a product makes it possible to decrease the roughness of its surface to Ra = 0.001 µm by rubbing it with a fine abrasive contained in a fabric or other soft material. This method takes too much time and is associated with abrasive particles and microscopic scratches remaining after the processing. As such, a non-contact treatment with plasma and accelerated particles has been chosen in the present work to study polishing of ceramic samples. The small angular divergence of fast argon atoms made it possible to obtain the dependence of the sample roughness on the angle α of the atom’s incidence on its surface. It was found that the roughness weakly depends on the angle α, if not exceeding the threshold value αo ~ 50°, and rapidly decreases with increasing α > αo. Polishing with fast argon atoms leads to a noticeable decrease in friction of ceramic samples.