Self-traceable angle standards with simplified traceability chain for dimensional metrology
Abstract Traceability is a fundamental issue for ensuring accuracy of nanometrology. A shortened traceability chain is advantageous for reducing calibration steps, thus reducing errors and raising application efficiency. A novel kind of two-dimensional grating is manufactured by atom lithography, whose pitch and (orthogonal) angle values are directly determined by natural constants, offering a feasible approach for effectively shortening the traceability chain. The PTB’s calibration results show that the two-dimensional grating has excellent orthogonality with a deviation of only 0.001°. The application of two-dimensional grating is demonstrated for the characterization of the angular distortion of a SEM, showing its great application potential.
Authors
- Deng Xiao (ORCID: https://orcid.org/0000-0002-4919-8201)
- Guangxu Xiao (ORCID: https://orcid.org/0000-0003-3996-6622)
- Yingfan Xiong
- Yushu Shi (ORCID: https://orcid.org/0000-0002-9586-253X)
- Xinbin Cheng (ORCID: https://orcid.org/0000-0002-3855-483X)
- Tongbao Li (ORCID: https://orcid.org/0009-0003-0480-9181)
- Zhijun Yin
- Zhoumiao Shi
- Yuying Xie (ORCID: https://orcid.org/0009-0003-1396-1038)
- Zhaohui Tang (ORCID: https://orcid.org/0000-0003-4726-4305)
- Jinming Gou
- Dongbai Xue (ORCID: https://orcid.org/0009-0008-8384-6066)
- Junyu Shen
Institutions
- Shenzhen Institute of Information Technology (CN)
- National Institute of Metrology (CN)
Publication Details
- Journal
- Applied Physics Express
- Published
- 2024-10-16
- DOI
- https://doi.org/10.35848/1882-0786/ad87a9
- Citations
- 5
- Primary Topic
- Advanced Measurement and Metrology Techniques
- Type
- article
- Field-Weighted Citation Impact
- 1.06
Funders
- National Natural Science Foundation of China