Adhesion layers between piezoelectric and magnetostrictive layers in a MEMS magneto-sensor stack: Influence on the phase transformation of deposited Co/Fe multilayers to magnetostrictive Co<i>x</i>Fe1−<i>x</i> phase

Magnetoelectric MEMS devices, such as magnetic field sensors, may be composed of a multilayer stack as a magnetostrictive layer, which is mechanically coupled to a piezoelectric film. Good adhesion and a stable rigid interface have to be maintained for such a sensor. Certain electric and magnetic properties, especially the magnetostriction, have to reach sufficiently high values, which can be achieved by selected phases or mixtures of phases. In this study, Co/Fe multilayers with varied bilayer periods are deposited onto AlN or Sc0.14Al0.86N coated Si substrates by DC magnetron sputtering with the optional insertion of a 5 nm thick adhesion layer of Cr or Zr to investigate its influence on the formation of the desired mixture of bcc and fcc Co0.7Fe0.3 phases, which are expected to yield a high magnetostrictive strain, after an RTA at 800 °C. A qualitative phase analysis is made by XRD in Bragg-Brentano geometry and shows that the bcc + fcc mixture can be achieved with a Cr interlayer. A sharp, void free, and undamaged interface for that case was observed in SEM images of cross sections prepared with FIB.