Optimizing crucible geometry to improve the quality of AlN crystals by the physical vapor transport method
In the conventional crucible structure for AlN crystal growth by physical vapor transport, owing to the long molecular transport path of Al vapor and the disruption of the gas flow by the presence of a deflector, the Al vapor easily forms polycrystals in the growth domain. The result is increased internal stress in the crystals and increased difficulty in growing large-sized crystals. On this basis, with the help of finite element simulations, a novel crucible structure is designed. This crucible not only optimizes the gas transport but also increases the radial gradient of the AlN crystal surface, making the enhanced growth rate in the central region more obvious. The thermal stresses between the deflector and the crystal are also reduced. High-quality AlN crystals with an FWHM of 79 arcsec were successfully grown with this structure, verifying the accuracy of finite element simulation of the growth of AlN crystals. Our work has important guiding significance for the growth of high-quality AlN crystals.
Authors
- Ruixian Yu
- Xiangang Xu
- Yajun Zhu (ORCID: https://orcid.org/0000-0002-5672-4126)
- Qiubo Li
- Yuzhu Wu
- Shouzhi Wang (ORCID: https://orcid.org/0000-0002-7868-1833)
- Lei Zhang (ORCID: https://orcid.org/0000-0002-2078-4215)
- Guodong Wang (ORCID: https://orcid.org/0000-0002-6262-7453)
- Lingshuang Lv
- Jingliang Liu (ORCID: https://orcid.org/0000-0001-8165-7079)
- W.Y Cao (ORCID: https://orcid.org/0009-0000-0560-8857)
Institutions
- Shandong University (CN)
- China Electronics Technology Group Corporation (CN)
- City University of Hong Kong, Shenzhen Research Institute (CN)
- State Key Laboratory of Crystal Materials
Publication Details
- Journal
- Journal of Applied Crystallography
- Published
- 2024-10-16
- DOI
- https://doi.org/10.1107/s1600576724009087
- Citations
- 2
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.37
Funders
- Shandong University
- Natural Science Foundation of Shandong Province
- Taishan Scholar Foundation of Shandong Province
- National Natural Science Foundation of China-Shandong Joint Fund
- Shenzhen Science and Technology Innovation Program