A 0.017 ^∘/h Rate-Integrating Micro-Shell Resonator Gyroscope Using Virtual Rotation Modulation

In this letter, a high-performance micro-shell resonator gyroscope (MSRG) working on rate-integrating mode with virtual rotation modulation (VRM) is presented for the first time. To suppress the angle-dependent bias and improve the long-term accuracy of MSRG, its vibrating pattern is virtually set to rotate forward and backward periodically, which is called virtual rotation modulation. Combined with the self-calibration for the virtual rotating rate and the aniso-damping, the RMS error of the device output under VRM is reduced. The experimental results show the MSRG with VRM can achieve a long-term bias instability (BI) of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$0.017~^{\circ }$ </tex-math></inline-formula>/h, a wide measurement range of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\pm 1200~^{\circ }$ </tex-math></inline-formula>/s with the scale factor nonlinearity of 0.77 ppm, a bandwidth of 200 Hz and a resolution and threshold of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\lt 0.004~^{\circ }$ </tex-math></inline-formula>/s. [2024-0106]