Fabrication of optimized partial-reflection coatings for mid-infrared quantum cascade lasers

Abstract This study presents both numerical modeling and experimental fabrication of three different partial-reflection (PR) coatings each optimized for quantum cascade lasers (QCLs) that emit radiation in the mid-infrared range. A novel double-layer PR coating comprising silicon dioxide (SiO 2) and silicon nitride (Si 3 N 4 ) was proposed as a potential solution for compatibility with QCLs fabrication processes. Subsequently, the PR coating was compared with two well-known PR coatings: a single layer of aluminum oxide (Al 2 O 3 ) and a single layer of yttrium oxide (Y 2 O 3 ). The coatings were designed to reduce the reflectivity of the front laser mirror from 30% to approximately 13%. The thickness of the dielectric layers was optimized for lasers emitting at 4.4 μm, with applicability in the 2.5–6 μm range. The proposed double-layer coating achieved the desired reflectivity while reducing the total coating thickness by 120 nm. By using the presented coatings it will be possible to increase the optical power of Mid-Infrared QCLs.