Electrostatic-field numerical calculation for the modular design of excimer laser diode

The excimer laser, with advantages of short wavelength, high energy, and tunable repetition rate, serves as an alternative device for inertial confinement fusion (ICF). However, the current bulky size of excimer lasers presents challenges for engineering implementation, leading to significant engineering difficulties. Modularization of diodes proves to be an effective approach for reducing device volume and engineering complexity. The goal of modularization is to achieve higher efficiency and reliability within a smaller footprint, where numerical calculations of electrostatic fields play a crucial role in realizing these objectives. This paper introduces the applications of electrostatic field numerical calculations in diode insulation structure design, suppression of cathode edge emission effects, and mitigation of electron beam scrapping effects, underscoring the scenarios where excimer laser diodes necessitate the utilization of electrostatic field calculations in their design. The research presented herein can serve as a reference for enhancing the efficiency and reliability of electron-beam-pumped excimer laser diodes.