Spectrum response capability of absolute surface calibration based on power spectral density analysis

The full-spectrum high-precision optical surface is important for advanced laser components, and the Fizeau interferometer serves as a coral tool for evaluating low-frequency surface errors of these surface. In high-precision surface calibrated method, absolute surface calibration are generally employed to calibrate the surface, thus obtaining their absolute surface errors. This paper proposed a novel absolute surface calculation method. Its spectral response capability was studied. Based on Gaussian Power Spectral Density(PSD), random errors of surface are constructed for this method. The method was studied by error analysis, including errors introduced during interpolation, Fourier transforms, rotation angles, and interpolation results with different power spectral densities was studied, which demonstrates that full-spectrum response capability of the absolute surface calibration method meets the high-precision optical surface metrology.