Study on the intelligent valuation technique of step height standards based on atomic force microscopy

A nanoscale high reference material is a physical reference material with a specific value, mainly used for the transfer and calibration of relevant nanometric instruments. this paper develops a probe scanning atomic force microscopes (AFM) system for step height topography characterization. Firstly, the step standard template is proposed, and the computation time is reduced by iterative approach. Second, the principle of AFM and the roughness measurement method are investigated. Finally, the same step height is compared and measured using AFM. The results show that the maximum standard deviation of the AFM is around 0.015.