Structure design and analysis of circle wheel angle fine-tuning mechanism

Abstract In this paper, an angle fine-tuning mechanism for a monochromator is designed. Through finite element analysis, three kinds of flexure hinges are simulated and analyzed respectively, which are bow, chamfered straight beam, and oval. The results show that the chamfered straight beam hinge is the optimal design. The test results of the prototype show that the resolution of the designed angle fine-tuning mechanism can reach 0.1 arcsec and the repetition accuracy is less than 0.441 arcsec. All the indexes meet the needs of the monochromator. Therefore, the angle fine-tuning structure meets the requirements of sub-micro radian motion.