Dynamic frequency digital holographic detection of MEMS galvanometers based on event cameras

The accelerated advancement of micro-electro-mechanical systems (MEMS) and microelectronic integrated circuits has led to a growing necessity for the dynamic detection and performance assessment of micro-nano sensors. Digital holography is a highly precise non-destructive measurement method that is capable of meeting the detection requirements of a range of parameters in both dynamic and static conditions. This paper presents a new method for measuring the dynamic parameters of MEMS mirror using a combination of digital holography and event cameras. By analyzing the full hologram recorded by the event camera of the MEMS mirror at a specific time sequence, the vibration frequency of the mirror can be obtained. Under identical experimental conditions, the vibration frequency that can be measured by the event camera is several times to several tens of times higher than that of a general high-speed camera, and it exhibits superior anti-interference performance.