Development of a virtual teaching module for advanced semiconductor fabrication and its learning effectiveness analysis

Abstract Semiconductor fabrication is the process of manufacturing semiconductor devices, typically integrated circuits (ICs) such as microprocessors and memory. This involves transferring circuit diagrams onto a silicon wafer using photomasks and photoresists. After a series of fabrication processes, ICs are created on the wafer surface and then diced into individual chips, which are packaged and tested with quality control procedures to become the final products. Virtual reality (VR) simulates imaginary experiences or environments difficult to achieve in the real world through human senses and immersive equipment, allowing users to interact in a virtual 3D space in real time, making it well suited for applications in science education and industrial training. This study transforms the essential knowledge of advanced semiconductor manufacturing processes into an easily understandable virtual teaching module, thereby creating educational resources for high school and college students. The objective is to enhance their scientific and technological literacy, yielding substantial benefits for the general public. This study utilized VR technology to simplify and clarify the knowledge about the semiconductor manufacturing process, making it more engaging for learners. The virtual teaching module's learning content includes an overview of wafer preparation, semiconductor fabrication, chip packaging, and IC testing. Users can interact with the virtual teaching module and conduct virtual experiments to enhance their understanding by trial and error. Experimental results show that it can improve students' learning achievement and learning motivation. Therefore, the virtual teaching module is suitable for high‐school students and the general public to understand semiconductor technology and its applications. The effectiveness of the virtual teaching module is heavily dependent on the availability and quality of VR hardware and software. Limited access to advanced VR equipment or technical issues could have affected the learning experience, thereby influencing the learning outcomes.