Local structure maturation in high entropy oxide (Mg,Co,Ni,Cu,Zn) _1‐ <i> _x </i> (Cr,Mn) <i> _x </i> O thin films

Abstract High entropy oxides (HEOs) have garnered much interest due to their available high degree of tunability. Here, we study the local structure of (MgNiCuCoZn) 0.167 (MnCr) 0.083 O, a composition based on the parent HEO (MgNiCuCoZn) 0.2 O. We synthesized a series of thin films via pulsed laser deposition at incremental oxygen partial pressures. X‐ray diffraction shows lattice parameters to decrease with increased pO 2 pressures until the onset of phase separation. X‐ray absorption fine structure shows that specific atomic species in the composition dictate the global structure of the material as Cr, Co, and Mn shift to energetically favorable coordination with increasing pressure. Transmission electron microscopy analysis on a lower‐pressure sample exhibits a rock salt structure, but the higher‐pressure sample reveals reflections reminiscent of the spinel structure. In all, these findings give a more complete picture of how (MgNiCuCoZn) 0.167 (MnCr) 0.083 O forms with varying initial conditions and advances fundamental knowledge of cation behavior in high entropy oxides.