Nitride spacer aided 0.15 <i>μ</i>m AlGaN/GaN HEMT fabrication with optimized gate patterning process

I-line stepper is widely used in large scale device manufacturing with limited achievable critical dimension by itself. With the aid of the spacer sidewall, the critical dimension can be further shrunk down. Spacer sidewall aided process necessitates an additional deposition-etching process, which inevitably results in process related damage under the gate. This paper proposes an optimized spacer sidewall aided gate patterning procedure for 0.15 μm GaN High Electron Mobility Transistors (HEMTs) fabrication. The process is proved to be effective in improving device performance compared to conventional sidewall process by keeping first Si-rich SiN passivation layer integrity at the gate edge. Interface trap density (Dit) and mobility were extracted for both conventional sidewall process and the optimized one with different passivation layers at the gate edge, demonstrating a lower Dit and higher mobility using the optimized process with enhanced device performances, such as higher current, breakdown voltage, and stress state characteristics, compared to the conventional process, which is promising for mass production of 0.15 μm GaN HEMTs.