ITO-Based Electrically Tunable Metasurface for Active Control of Light Transmission
In recent years, the rapid development of dynamically tunable metasurfaces has provided a new avenue for flexible control of optical properties. This paper introduces a transmission-type electrically tunable metasurface, employing a series of subwavelength-scale silicon (Si) nanoring structures with an intermediate layer of Al<sub>2</sub>O<sub>3</sub>-ITO-Al<sub>2</sub>O<sub>3</sub>. This design allows the metasurface to induce strong Mie resonance when transverse electric (TE) waves are normally incident. When a bias voltage is applied, the interaction between light and matter is enhanced due to the formation of an electron accumulation layer at the ITO-Al<sub>2</sub>O<sub>3</sub> interface, thereby altering the resonance characteristics of the metasurface. This design not only avoids the absorption loss of metal nanostructures and has a large modulation depth, but also shows compatibility with complementary metal oxide semiconductor (CMOS) technology.
Authors
- Dandan Wen
- Peiyang Li (ORCID: https://orcid.org/0000-0001-9382-9261)
- Dong Li (ORCID: https://orcid.org/0000-0002-6202-3879)
- Ruize Ma
- Yu Mao (ORCID: https://orcid.org/0009-0000-8205-1466)
Institutions
- Northwestern Polytechnical University (CN)
- Ministry of Industry and Information Technology (CN)
Publication Details
- Journal
- Nanomaterials
- Published
- 2024-10-05
- DOI
- https://doi.org/10.3390/nano14191606
- Citations
- 5
- Primary Topic
- Metamaterials and Metasurfaces Applications
- Type
- article
- Field-Weighted Citation Impact
- 0.59
Funders
- National Natural Science Foundation of China
- National Key Research and Development Program of China