Piezoelectric Shunt Damping for a Planar Motor Application under Cryogenic Conditions

For several decades, Moore’s law has driven the semiconductor industry, with computational power and production costs as the main drivers. Such drivers have enabled several technological innovations in the mechatronics and dynamics architecture of photolithography machines, used for semiconductor circuits manufacturing. Among current investigations, the use of superconductive magnets would enable higher accelerating stages and, thus, higher throughput and lower manufacturing costs. However, this involves a complex magnet structure that needs to operate at cryogenic temperatures and mechanical resonances at relatively low frequencies as a result of the thermal architecture of the system. The damping options are also limited due to the very low temperature. This paper explores the use of shunted piezoelectric transducers for damping the internal modes of the magnet mass. A classical resistive and inductive RL shunt is considered. The study was conducted both numerically and experimentally on a demonstrator of a superconductive magnet plate concept, where piezoelectric transducers are incorporated to support the superconducting coils. The study demonstrates the effectiveness of piezoelectric shunts as a damping solution at very low temperatures, with limited impact of the temperature variation on the performance.