Active vibration isolation support platform for double crystal monochromator

The quality of the beamline at a synchrotron light source is directly related to the performance of the double crystal monochromator. This paper presents a designed active vibration isolation support platform for the double-crystal monochromator to meet the higher stability demands of advancing synchrotron light sources. The platform has good decoupling characteristics through the redundant structure of eight actuators mixed with active and passive. A vibration isolation control scheme is designed based on distributed degrees of freedom and a feed-forward feedback composite control scheme to ensure high stiffness of the support platform while achieving full-band vibration isolation. Finally, constructed a verification platform for an active vibration isolation system and verified the effectiveness of the proposed control method through experiments. With the designed active vibration isolation algorithm, the system can achieve full-band vibration isolation within the 1–100 Hz bandwidth.