Measurement of Electromagnetic Parameters of Inductively Coupled Plasma Based on Langmuir Probe

Langmuir probe is one of the basic diagnostic methods for plasma properties. In this paper, a single probe is used to measure the electromagnetic parameters of Inductively Coupled Plasma under different discharge conditions, the principle of single probe measurement is introduced, and the electron density parameters of Inductively Coupled Plasma are extracted for analysis. According to the measurement results, it is found that the electron density increases with the increase of air pressure when the air pressure is 0.8torr-1.1torr. The electron density in the 1.1torr-1.3torr range will gradually decrease. As the power increases from 700W to 1000W, the electron density first increases and then decreases.