Sensitivity of excimer laser optics damage to trace contaminants

We have developed a new accelerated laser-induced damage testing (ALDT) protocol to evaluate the sensitivity of deep-ultraviolet (DUV) excimer laser optics to trace contaminants added to the purge gas environment. This testing reveals a strong sensitivity of optics damage mode and lifetime to added contaminants with ppm to sub-ppm level concentrations.

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Publication Details

Published
2024-10-02
DOI
https://doi.org/10.1117/12.3032768
Primary Topic
Laser Design and Applications
Type
article
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article

Sensitivity of excimer laser optics damage to trace contaminants

Walt Gillespie, Jian Lu
Laser Design and Applications
article

Sensitivity of excimer laser optics damage to trace contaminants

Walt Gillespie, Jian Lu
article en

Abstract

We have developed a new accelerated laser-induced damage testing (ALDT) protocol to evaluate the sensitivity of deep-ultraviolet (DUV) excimer laser optics to trace contaminants added to the purge gas environment. This testing reveals a strong sensitivity of optics damage mode and lifetime to added contaminants with ppm to sub-ppm level concentrations.

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Laser Design and Applications
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Sensitivity of excimer laser optics damage to trace contaminants — Walt Gillespie, Jian Lu · (2024) | TGRS Research Map | TGRS